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Sample text

Measuring the near-normal reflectance requires relatively simple equipment and has been reported by many groups. Breiland and Killeen [85] have reviewed the early work and showed how growth rates and compositional information can be extracted using the virtual interface method pioneered by Aspnes [84]. 1% for layer thicknesses of 20-40nm. The composition of A1GaAs layers grown by MOCVD has been measured after deriving the optical constants at the growth temperature from layers of GaAs and AlAs.

GI is also a necessary technique when transitioning between different layers in a heterojunction. Considerable effort must be invested to find the best switching mechanism to optimize the interface depending on the material systems involved. EPITAXIAL FILM GROWTH AND CHARACTERIZATION ' I " I 9o EXP. x10-3 atm O Ga z=1/2 O As z=1/2 9 [ooi] [11o1 L Do ,_l ...... uJ t'lr "r I" 35 LATERAL Dio] Go z =0 9 ^, , : o YD,o] [ooi] ~ 0,0] 5 O rr" L'3 VERTICAL 0 50( . I 600 GROWTH .... ~ ' o 1 700 TEMPERATURE , D~o] I 800 STEP (a) D,o] STEP (b) ("C) FIG.

The cost of the major metalorganics, particularly TMGa, has been decreasing as the volume of use has increased, reflecting higher production volumes required by the suppliers. Group V Sources: Despite their toxicity, the hydrides continue to be the most widely used Group V precursors. Their widespread use is due to a combination of relatively low cost and high purity. The convenience of a gaseous source is also a reason. The organic materials TBA and TBP are used less frequently; their lower toxicity is outweighed by their higher cost for many users.

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